Semiconductor grade high purity quartz ceramic crucible is pulling large diameter silicon consumption vessel, each producing a monocrystalline silicon furnace spent a crucible. Single crystal silicon is the raw material for the production of large-scale IC, and it is very demanding for the crucible.. Generally the quartz ceramic crucible requirements: the material must be of high purity semiconductor grade; high temperature resistance; size of the crucible; high precision; the heat preservation performance is good; energy saving; product quality and good consistency; high stability.
The quartz ceramic crucible should be paid attention when used:
1, quartz ceramic crucible can be in the burning of 1700 degrees below, but burning temperature higher than 1100 degrees quartz will become opaque, so melting temperature should not exceed 800 degrees.
2, can not touch the HF and, at high temperature, and carbonate was easily caustic and alkali metal. |